microsensor

A submicrometer- to millimeter-size device that converts a nonelectrical physical or chemical quantity, such as pressure, acceleration, temperature, or gas concentration, into an electrical signal; it is generally able to offer better sensitivity, accuracy, dynamic range, and reliability, as well as lower power consumption, compared to larger counterparts.

圧力、加速度、温度、ガス濃度などの非電気的な物理量または化学量を電気信号に変換する、サブマイクロメートルからミリメートルサイズの装置；大型のものと比較して、感度、精度、ダイナミックレンジ、信頼性に優れ、消費電力も低いのが一般的である